X-RAY TUBE AND X-RAY GENERATOR

To provide an X-ray tube and an X-ray generator with which it is possible to detect the degree of vacuum in an early high vacuum region with high accuracy, as well as prevent abnormal electric discharges and monitor a life length.SOLUTION: Provided is an X-ray tube comprising a package 11 for holdin...

Full description

Saved in:
Bibliographic Details
Main Authors MORIYA JUNICHI, KIBA HIROYUKI, TAKAHASHI YOSHIFUMI, KURISU SHINKI
Format Patent
LanguageEnglish
Japanese
Published 27.06.2019
Subjects
Online AccessGet full text

Cover

Loading…
More Information
Summary:To provide an X-ray tube and an X-ray generator with which it is possible to detect the degree of vacuum in an early high vacuum region with high accuracy, as well as prevent abnormal electric discharges and monitor a life length.SOLUTION: Provided is an X-ray tube comprising a package 11 for holding the inside at a prescribed degree of vacuum, a filament 12 for electron emission and a focusing electrode 13 provided in the package 11, and a target 15 for X-ray generation which is provided facing the filament 12 and the focusing electrode 13 in the package 11. The package 11 includes a package body 11a and an X-ray window part 16 the X-ray permeability and electric conductivity of which are higher than those of the package body 11a, the X-ray window part 16 or an anode 14 being set to a lower potential than any of the anode 14 or the X-ray window part 16 and the filament 12 and the focusing electrode 13, thereby making it possible to detect at least one of an ion current Ii and an electron current Ie via the X-ray window part 16 or the anode 14.SELECTED DRAWING: Figure 1 【課題】初期の高真空領域の真空度を高感度に検出でき、異常放電の未然防止や寿命時期を監視可能なX線管およびX線発生装置を提供する。【解決手段】内部を所定の真空度に保持する外囲器11と、外囲器11内に設けられた電子放出用のフィラメント12および集束電極13と、外囲器11内にフィラメント12および集束電極13に対向して設けられたX線発生用のターゲット15とを備えたX線管であって、外囲器11が、外囲器本体11aと、外囲器本体11aよりX線透過率および電気伝導率が高いX線窓部16とを有しており、そのX線窓部16または陽極14が、陽極14またはX線窓部16と陰極のフィラメント12および集束電極13とのいずれよりも低電位に設定されていることで、X線窓部16または陽極14を介してイオン電流Iiと電子電流Ieとの少なくとも一方の電流を検出可能である。【選択図】図1
Bibliography:Application Number: JP20170239603