MEASUREMENT INSTRUMENT AND SAMPLE HOLDER USED FOR THE SAME

• Main Author: SHIRAIWA HISASHI
• Format: Patent
• Language: English; Japanese
• Published: 27.06.2019
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

To provide a sample holder capable of reducing the holding and removal work of a sample when a plurality of samples having different shapes are measured, and facilitating the alignment of the held samples, and to provide a measurement instrument in which the sample holder is used.SOLUTION: The measurement instrument includes a sample holder 10 capable of mounting a plurality of samples, a measurement part for measuring a plurality of samples mounted on the sample holder 10, and a control section for controlling the position of the measurement part with respect to the sample to be measured. The sample holder 10 includes a substrate 1 and a holding part 2 for holding the sample on the substrate 1. The holding part 2 has a configuration in which a plurality of samples having different shapes can be held at the center position of the holding part 2.SELECTED DRAWING: Figure 1 【課題】形状の異なる複数の試料を測定する場合に試料の保持・取り外し作業を軽減し、保持した試料の位置合わせが容易なサンプルホルダ、および当該サンプルホルダを用いる測定装置を提供する。【解決手段】測定装置は、複数の試料を載置することが可能なサンプルホルダ１０と、サンプルホルダ１０に載置された複数の試料を測定する測定部と、測定する試料に対する測定部の位置を制御する制御部とを備えている。サンプルホルダ１０は、基板１と、基板１に複数設けられ、試料を保持する保持部２とを含んでいる。保持部２は、形状の異なる複数の試料を保持部２の中心位置で保持することができる構成を有する。【選択図】図１