PHOTOELECTRIC CONVERSION DEVICE, METHOD FOR MANUFACTURING THE SAME, AND EQUIPMENT

• Main Authors: KANEDA TSUBASA, SHOYAMA TOSHIHIRO
• Format: Patent
• Language: English; Japanese
• Published: 24.06.2019
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC COMMUNICATION TECHNIQUE; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; PICTORIAL COMMUNICATION, e.g. TELEVISION; SEMICONDUCTOR DEVICES

To provide a technique advantageous for suppressing generation of dark current or a white scratch.SOLUTION: A photoelectric conversion device comprises a photoelectric conversion unit arranged in a semiconductor substrate made of silicon, and a transistor arranged on a surface of the semiconductor s...