PRESSURE SENSOR

• Main Authors: KIHARA NAOYA, NADA HIDEAKI
• Format: Patent
• Language: English; Japanese
• Published: 20.06.2019
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

To provide a pressure sensor including electrodes arranged by being spaced apart from each other, in which a correctly measurable pressure measurement range is expanded.SOLUTION: A pressure sensor 1 comprises a common electrode 9 which is used in a state of being mounted along a curved face, a plurality of discrete electrodes 31, a plurality of thin-film transistors 30, a first pressure-sensitive layer 33Z, and a second pressure-sensitive layer 33Y. The first pressure-sensitive layer 33Z is laminated on the common electrode 9 side of a first electrode 31Z among the plurality of discrete electrodes 31. The second pressure-sensitive layer 33Y is laminated on the common electrode 9 side of a second electrode 31Y among the plurality of discrete electrodes 31. A gap P1 between the first pressure-sensitive layer 33Z and the common electrode 9 is shorter than a gap P2 between the second pressure-sensitive layer 33Y and the common electrode 9. The first pressure-sensitive layer 33Z includes a first portion 33A, and a second portion 33B formed below the first portion 33A and forming a first constricted part 51 near a boundary with the first portion 33A.SELECTED DRAWING: Figure 4 【課題】互いに隙間を空けて配置された電極を有する圧力センサにおいて、正確に測定できる圧力測定範囲を広くする。【解決手段】圧力センサ１は、曲面に沿って装着された状態で使用されるものであって、共通電極９と、複数の個別電極３１と、複数の薄膜トランジスタ３０と、第１感圧層３３Ｚと、第２感圧層３３Ｙとを備えている。第１感圧層３３Ｚは、複数の個別電極３１のうちの第１電極３１Ｚの共通電極９側の面に積層されている。第２感圧層３３Ｙは、複数の個別電極３１のうちの第２電極３１Ｙの共通電極９側の面に積層されている。第１感圧層３３Ｚと共通電極９との間の隙間Ｐ１は、第２感圧層３３Ｙと共通電極９との隙間Ｐ２より短い。第１感圧層３３Ｚは、第１部分３３Ａと、第１部分３３Ａの下に形成されて第１部分３３Ａとの境界付近に第１くびれ部５１を形成する第２部分３３Ｂとを有する。【選択図】図４