SURFACE ACOUSTIC WAVE DEVICE, METHOD OF MANUFACTURING THE SAME, FILTER, AND MULTIPLEXER
To suppress entry of moisture, etc. into a surface acoustic wave resonator.SOLUTION: The acoustic wave device includes: a first substrate 10 having a first surface and side surfaces 10e; a surface acoustic wave resonator provided on the first surface of the first substrate 10; and a first insulator...
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Main Author | |
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Format | Patent |
Language | English Japanese |
Published |
13.06.2019
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Subjects | |
Online Access | Get full text |
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Summary: | To suppress entry of moisture, etc. into a surface acoustic wave resonator.SOLUTION: The acoustic wave device includes: a first substrate 10 having a first surface and side surfaces 10e; a surface acoustic wave resonator provided on the first surface of the first substrate 10; and a first insulator film 16 covering the surface acoustic wave resonator and in contact with at least a side surface 10c on the first surface side among the side surfaces 10e of the first substrate 10.SELECTED DRAWING: Figure 1
【課題】弾性波共振器への水分等の侵入を抑制すること。【解決手段】本発明は、第1面および側面10eを有する第1基板10と、前記第1基板10の第1面に設けられた弾性波共振器と、前記弾性波共振器を覆い、前記第1基板10の側面10eのうち少なくとも前記第1面側の側面10cと接する第1絶縁体膜16と、を備える弾性波デバイスである。【選択図】図1 |
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Bibliography: | Application Number: JP20170218263 |