PHOTOSENSITIVE RESIN COMPOSITION AND CURED FILM PREPARED THEREFROM

• Main Authors: GEUN HUH, KAHEE SHIN, YANG JONG HAN
• Format: Patent
• Language: English; Japanese
• Published: 13.06.2019
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CHEMISTRY; CINEMATOGRAPHY; COMPOSITIONS BASED THEREON; ELECTROGRAPHY; HOLOGRAPHY; MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONSONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS; MATERIALS THEREFOR; METALLURGY; ORGANIC MACROMOLECULAR COMPOUNDS; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; THEIR PREPARATION OR CHEMICAL WORKING-UP

To provide a cured film excellent in transparency, sensitivity, chemical resistance and adhesion when immersed in a peeling solution.SOLUTION: Penetration of a developer is promoted and sensitivity is improved by including a hydrophilic additive. The additive comprises an epoxy group, and the epoxy group of the additive combines with a silanol group in a siloxane polymer to improve chemical resistance of a resin composition. An effect for keeping adhesion with metal good even when being immersed in a peeling solution is shown and chemical resistance is improved since an isocyanurate group and an ester group is contained.SELECTED DRAWING: Figure 1 【課題】透明性、感度、耐薬品性、及び剥離液に浸漬した際の接着性に優れた硬化膜を提供する。【解決手段】親水性添加剤を含むことにより、現像液の浸透を促進し、感度を向上させる。この添加剤はエポキシ基を含み、添加剤のエポキシ基はシロキサンポリマー中のシラノール基と結合して樹脂組成物の耐薬品性を改善する。イソシアヌレート基とエステル基とを含むため、剥離液に浸漬しても金属との接着性を良好に保つ効果とともに、耐薬品性を向上させる。【選択図】図１