CONTROL METHOD OF COATING DEVICE

To provide a control method of a coating device that is capable of restraining reduction in film forming quality at the finish of coating even when coating with a coating liquid of prescribed high viscosity.SOLUTION: A control method is provided for a coating device 1 that coats a work 50 with a coa...

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Bibliographic Details
Main Authors GONDO SATOSHI, YAMASHITA AKIRA
Format Patent
LanguageEnglish
Japanese
Published 13.06.2019
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Summary:To provide a control method of a coating device that is capable of restraining reduction in film forming quality at the finish of coating even when coating with a coating liquid of prescribed high viscosity.SOLUTION: A control method is provided for a coating device 1 that coats a work 50 with a coating liquid of prescribed high viscosity by discharging it from a nozzle 10 and capable of sucking back the coating liquid stuck to a discharge port 10a of the nozzle 10 at the finish of coating the work 50 with the coating liquid. The coating device 1 comprises a decompression chamber 11 for placing an upstream side space 30 in a coating direction in the vicinity of the discharge port 10a of the nozzle 10 under negative pressure with respect to atmospheric pressure at the finish of coating, where a negative pressure operation period during which the upstream side space 30 is placed under negative pressure with respect to the atmospheric pressure is made to substantially coincide with a sucking-back operation period during which the coating liquid is suck back at the finish of coating.SELECTED DRAWING: Figure 2 【課題】所定の高粘度の塗工液の塗布する場合にも、塗り終わり時に成膜品質の低下を抑制することができる、塗工装置の制御方法を提供する。【解決手段】所定の高粘度の塗工液をノズル10から吐出させてワーク50に塗布するとともに、ワーク50への塗工液の塗り終わり時にノズル10の吐出口10aに付着した塗工液の吸い戻しを行うことが可能な塗工装置1の制御方法であって、塗工装置1は、塗り終わり時に、ノズル10の吐出口10a近傍における塗布方向の上流側空間30を大気圧に対して負圧にするための減圧チャンバー11を備え、塗り終わり時に上流側空間30を大気圧に対して負圧にする負圧動作期間が、塗工液の吸い戻しを行う吸い戻し動作期間と実質的に一致するようにする。【選択図】図2
Bibliography:Application Number: JP20170221200