CAUSAL RELATIONSHIP MODEL CONSTRUCTION SYSTEM AND METHOD

• Main Authors: HORIWAKI KAZUKI, IMAZAWA KEI
• Format: Patent
• Language: English; Japanese
• Published: 30.05.2019
• Subjects: CONTROL OR REGULATING SYSTEMS IN GENERAL; CONTROLLING; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS; PHYSICS; REGULATING

To provide a technology which can improve the prediction accuracy of a model and, as a result, can improve manufacturing quality and the like with respect to a causal relationship model construction technology for manufacturing support and the like.SOLUTION: A causal relationship model construction system is composed of a computing machine, and performs information processing to construct a causal relationship model related to a manufacturing flow of a control object. The computing machine constructs a causal relationship model using monitor data representing the state of each of a plurality of steps of the manufacturing flow and quality data of the inspection step results. Using the causal relationship model and the target value of the quality data, an acceptable range for the monitor data is specified so as to satisfy the target value from the prediction based on the causal relationship between the plurality of monitor data. The computing machine graphically displays information including the acceptable range of the causal relationship model and monitor data on a screen such as a causal relationship model display 210 and a monitor data acceptable limit display 220.SELECTED DRAWING: Figure 4 【課題】製造支援等のための因果関係モデル構築技術に関して、モデルの予測精度を向上でき、その結果として製造品質等を向上することができる技術を提供する。【解決手段】因果関係モデル構築システムは、計算機で構成され、制御対象の製造フローに関する因果関係モデルを構築する情報処理を行う。計算機は、製造フローの複数の各々の工程の状態を表すモニタデータと、検査工程の結果の品質データとを用いて、因果関係モデルを構築し、因果関係モデルと、品質データの目標値とを用いて、複数のモニタデータの間の因果関係に基づいた予測から、目標値を満たすように、モニタデータの許容範囲を特定する。計算機は、因果関係モデルおよびモニタデータの許容範囲を含む情報を、因果関係モデル表示２１０およびモニタデータ許容範囲表示２２０のように、画面にグラフィカルに図示して表示する。【選択図】図４