PROBE ELEMENT AND COORDINATE MEASURING MACHINE FOR MEASURING AT LEAST ONE MEASUREMENT OBJECT

• Main Authors: AKSEL GOEHNERMEIER, FERDINAND BADER, DIETRICH IMKAMP
• Format: Patent
• Language: English; Japanese
• Published: 16.05.2019
• Subjects: MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

To provide a probe element and a coordinate measuring machine for measuring at least one measurement object.SOLUTION: A probing element 100 for measuring at least one measurement object is provided. The probe element 100 for measuring at least one measurement object 114 includes: at least one first optical sensor 110 configured to generate at least one first sensor signal depending on a fine shape of at least one surface 112 of the measurement object 114; at least one second sensor 128 configured to generate at least one second sensor signal depending on a coarse shape of the measurement object 114, and/or distance to the measurement object 114. The at least one first optical sensor 110 has a first measurement region and the second sensor 128 has a second measurement region. The first optical sensor 110 is at least partly integrated in the second sensor 128 to permit the first measurement region and the second measurement region to at least partly overlap.SELECTED DRAWING: Figure 1 【課題】少なくとも１つの測定対象を測定するためのプローブ素子および座標測定機を提供する。【解決手段】少なくとも１つの測定対象１１４を測定するプローブ素子１００であって、測定対象１１４の少なくとも１つの表面１１２の微細形状に応じて少なくとも１つの第１センサ信号を生成すべく構成された少なくとも１つの第１光センサ１１０と、測定対象１１４の粗形状および／または測定対象１１４までの距離に応じて少なくとも１つの第２センサ信号を生成すべく構成された少なくとも１つの第２センサ１２８とを含むプローブ素子１００を提案する。第１光センサ１１０は第１測定領域を有し、第２センサ１２８は第２測定領域を有する。第１光センサ１１０は、第１測定領域および第２測定領域が少なくとも部分的に重なるように、第２センサ１２８内に少なくとも部分的に組み込まれている。【選択図】図１