ELECTROMECHANICAL CONVERSION ELEMENT, LIQUID DISCHARGE HEAD, LIQUID DISCHARGE UNIT, DEVICE DISCHARGING LIQUID, ULTRASONIC GENERATOR, AND METHOD FOR MANUFACTURING ELECTROMECHANICAL CONVERSION ELEMENT

• Main Authors: TAKEUCHI JUN, MAGAI MASARU, ABE SHUYA
• Format: Patent
• Language: English; Japanese
• Published: 09.05.2019
• Subjects: CORRECTION OF TYPOGRAPHICAL ERRORS; ELECTRICITY; FOR PERFORMING MECHANICAL WORK IN GENERAL; GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL; i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; LINING MACHINES; METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICALVIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY; PERFORMING OPERATIONS; PRINTING; SELECTIVE PRINTING MECHANISMS; STAMPS; TRANSPORTING; TYPEWRITERS

To provide an electromechanical conversion element that can reduce wiring resistance of a common electrode, can improve a high frequency property and reduce power consumption, and reduces a manufacturing cost.SOLUTION: An electromechanical conversion element comprises: a first electrode layer formed on a substrate; electromechanical conversion films formed on the first electrode layer; and a second electrode layer formed on the first electrode layer and the electromechanical conversion films. The second electrode layer consists of first portions formed only on the electromechanical conversion films, and a second portion formed in contact with the first electrode layer and the electromechanical conversion films, and formed separated from the first portions; the first electrode layer and the second portion are in contact with each other at the same outer edge portion excluding portions where the second portion is formed on the electromechanical conversion films.SELECTED DRAWING: Figure 1 【課題】共通電極の配線抵抗を抑えることができ、高周波特性の向上や消費電力の抑制が可能であるとともに、製造コストを抑えた電気機械変換素子を提供する。【解決手段】基板上に形成された第１の電極層と、前記第１の電極層上に形成された電気機械変換膜と、前記第１の電極層上及び前記電気機械変換膜上に形成された第２の電極層と、を有する電気機械変換素子であって、前記第２の電極層は、前記電気機械変換膜上にのみ形成された第一の部分と、前記第１の電極層上及び前記電気機械変換膜上に接して形成され、前記第一の部分と分離して形成された第二の部分とからなり、前記第二の部分が前記電気機械変換膜上に形成されている部分を除き、前記第１の電極層と前記第二の部分が接する部分の外縁が同じであることを特徴とする。【選択図】図１