THROUGH-ELECTRODE SUBSTRATE AND MANUFACTURING METHOD THEREOF

• Main Authors: TAKAHASHI NAOHIRO, CHIGIRA ATSUKO, NARITA YUJI, SASAO KEITA, NAKAZAWA SUSUMU, FURUSHO HIROKI
• Format: Patent
• Language: English; Japanese
• Published: 25.04.2019
• Subjects: BASIC ELECTRIC ELEMENTS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS; PRINTED CIRCUITS; SEMICONDUCTOR DEVICES

To provide: a through-electrode substrate having high reliability to high-temperature treatment; and a manufacturing method of the through-electrode substrate having the high reliability to the high-temperature treatment.SOLUTION: A through-electrode substrate 104 comprises: a substrate having a first face 140a, a second face 140b, and a through-hole 126 penetrating the first face and the second face; a through-electrode 118 provided in the through-hole; first wiring 122, provided on the first face, which has a center line 200a that substantially coincides with the center line of the through-hole and has a first opening 123 with a hole diameter D2 that is larger than a hole diameter D1 of the through-hole; an insulation film, provided on the first face and the first wiring, which has a center line that substantially coincides with the center line of the first opening and has a second opening 124a with a hole diameter D3 that is larger than the hole diameter of the first opening; and second wiring 110 which is provided on the insulation film so as to be electrically connected to the first wiring via an opening different from the second opening.SELECTED DRAWING: Figure 4 【課題】高温処理に対する信頼性が高い貫通電極基板と、高温処理に対する信頼性が高い貫通電極基板の製造方法を提供する。【解決手段】貫通電極基板１０４であって、第１面１４０ａと、第２面１４０ｂと、第１面と第２面とを貫通する貫通孔１２６と、を有する基板と、貫通孔に設けられる貫通電極１１８と、中心線２００ａが貫通孔の中心線と略一致し、孔径Ｄ２が貫通孔の孔径Ｄ１よりも大きい第１開口１２３部を有し、第１面上に設けられる第１配線１２２と、中心線が第１開口部の中心線と略一致し、孔径Ｄ３が第１開口部の孔径よりも大きい第２開口部１２４ａを有し、第１面及び第１配線上に設けられる絶縁膜と、絶縁膜上に設けられ、第２開口部とは異なる開口部を介して、第１配線と電気的に接続される第２配線１１０と、を有する。【選択図】図４