METHOD OF PROCESSING MOLD RELEASING, MOLD, AND ANTI-REFLECTION COATING

• Main Author: NAKAMATSU KENICHIRO
• Format: Patent
• Language: English; Japanese
• Published: 25.04.2019
• Subjects: AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PERFORMING OPERATIONS; PHYSICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR; SHAPING OR JOINING OF PLASTICS; TRANSPORTING; WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL

To provide a novel method of processing mold releasing, a mold processed with mold releasing, and an anti-reflection coating that improve sustainability of a mold releasing property of a mold including a porous alumina layer on a surface thereof.SOLUTION: A method of processing mold releasing of this invention comprises: a step A of preparing a mold (100) including a porous alumina layer (14) on a surface thereof, a precursor solution (21) including a silicon oxide precursor and a solvent, and a mold releasing agent including a fluorine-based silane coupling agent; a step B of applying the precursor solution to the surface; a step C, after the step B, of at least reducing the solvent included in the precursor solution applied to the surface; a step D, after the step B, of forming an insulation layer (22) including silicon oxide and substantially no carbon by calcining the silicon oxide precursor included in the precursor solution applied to the surface; and a step E, after the step C and step D, of applying the mold releasing agent to the surface.SELECTED DRAWING: Figure 1 【課題】表面にポーラスアルミナ層を有する型の離型性の持続性を向上させる、新規な離型処理方法、離型処理された型、および反射防止膜を提供する。【解決手段】離型処理方法は、表面にポーラスアルミナ層（１４）を有する型（１００）と、酸化珪素前駆体と溶媒とを含む前駆体溶液（２１）と、フッ素系シランカップリング剤を含む離型剤とを用意する工程Ａと、表面に前駆体溶液を付与する工程Ｂと、工程Ｂの後に、表面に付与された前駆体溶液に含まれる溶媒を少なくとも減少させる工程Ｃと、工程Ｂの後に、表面に付与された前駆体溶液に含まれる酸化珪素前駆体を焼成することによって、酸化珪素を含み、炭素を実質的に含まない絶縁層（２２）を形成する工程Ｄと、工程Ｃおよび工程Ｄの後に、表面に離型剤を付与する工程Ｅとを包含する。【選択図】図１