STAGE DRIVE DEVICE AND DRAWING DEVICE

To suppress thermal expansion in a watch area of a base plate.SOLUTION: A stage drive device 5 includes: a base plate 51 where a stage is provided; a pair of guide rails; a pair of rail engagement units 53 that engage with the pair of guide rails respectively; a linear motor for moving a movable ele...

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Bibliographic Details
Main Authors KANDA HIROYUKI, HARA NOZOMI
Format Patent
LanguageEnglish
Japanese
Published 18.04.2019
Subjects
CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
DYNAMO-ELECTRIC MACHINES
ELECTRICITY
GENERATION
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Summary:To suppress thermal expansion in a watch area of a base plate.SOLUTION: A stage drive device 5 includes: a base plate 51 where a stage is provided; a pair of guide rails; a pair of rail engagement units 53 that engage with the pair of guide rails respectively; a linear motor for moving a movable element 546 in a transfer direction; and a movable element stationary unit 55 for fixing the movable element 546 against the base plate 51. A minimum rectangular area containing a plurality of attachment areas A11 where the pair of rail engagement units 53 are attached in a lower face 512 of the base plate 51 is specified as a watching area A12. A stationary position P11 where the movable element stationary unit 55 is fixed on the base plate 51 is located outside of the transfer direction relative to the watching area A12. As a result, thermal expansion in the watching area A12 of the base plate 51 can be suppressed.SELECTED DRAWING: Figure 5 【課題】ベースプレートの注目領域における熱膨張を抑制する。【解決手段】ステージ駆動装置５は、ステージが設けられるベースプレート５１と、一対のガイドレールと、一対のガイドレールとそれぞれ係合する一対のレール係合部５３と、可動子５４６を移動方向に移動するリニアモータと、可動子５４６をベースプレート５１に対して固定する可動子固定部５５とを備える。ベースプレート５１の下面５１２において、一対のレール係合部５３が取り付けられる複数の取付領域Ａ１１を含む最小の矩形領域を注目領域Ａ１２として、ベースプレート５１において可動子固定部５５が固定される固定位置Ｐ１１が、注目領域Ａ１２よりも、移動方向の外側に位置する。これにより、ベースプレート５１の注目領域Ａ１２における熱膨張を抑制することができる。【選択図】図５
Bibliography:Application Number: JP20170184801