SUPPORT SYSTEM FOR SPECIFIC INSPECTION, SUPPORTING METHOD FOR SPECIFIC INSPECTION, AND PROGRAM

• Main Authors: NOGUCHI MINORU, TADA NOBUYOSHI, OMINAMI YUSUKE, TANAKA SEIYA, GOTO MAYA
• Format: Patent
• Language: English; Japanese
• Published: 18.04.2019
• Subjects: CALCULATING; COMPUTER SYSTEMS BASED ON SPECIFIC COMPUTATIONAL MODELS; COMPUTING; COUNTING; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

To provide a support technology that can improve accuracy of specific inspection using an electron microscope and improve work efficiency.SOLUTION: A support system for specific inspection comprises: storage means in which learning data information that includes reference image data and reference element analysis data serving as evaluation standard with regard to one or more inspection objects, and inspection recipe information that includes a control program of a measuring device for acquiring image data and element analysis data for analyzing the one or more inspection objects are stored; means for receiving attribute information of an inspection sample for which analysis of the inspection object is performed; recipe output means for specifying inspection recipe information that corresponds to the inspection object on the basis of the attribute information of the inspection sample and outputting the specified inspection recipe information to the measuring device; and evaluation means for collating the image data and element analysis data acquired by the measuring device according to the control program of the inspection recipe information with the reference image data and reference element analysis data of the inspection object and thereby analyzing and evaluating the inspection object of the inspection sample.SELECTED DRAWING: Figure 1 【課題】電子顕微鏡を用いた特定検査の精度を高め、作業効率を向上させる支援技術を提供する。【解決手段】特定検査向け支援システムは、１以上の検査対象物ついての評価基準になる基準画像データおよび基準元素分析データを含む学習データ情報と、１以上の検査対象物を分析するための画像データおよび元素分析データを所定条件で取得する計測装置の制御プログラムを含む検査レシピ情報が格納される記憶手段と、検査対象物の分析が行われる検査試料の属性情報を受け付ける手段と、検査試料の属性情報に基づいて検査対象物に対応する検査レシピ情報を特定し、特定した検査レシピ情報を計測装置に出力するレシピ出力手段と、検査レシピ情報の制御プログラムに従って計測装置で取得された画像データおよび元素分析データと、検査対象物の基準画像データおよび基準元素分析データとの照合により検査試料の検査対象物の分析評価を行う評価手段と、を備える。【選択図】図１