PHOTODETECTOR, OPTICAL DETECTION DEVICE, LIDAR DEVICE AND MANUFACTURING METHOD OF PHOTODETECTOR

• Main Authors: SUZUKI KAZUHIRO, NOFUSA YUKI, YOSHIDA JIRO, UENO RISAKO
• Format: Patent
• Language: English; Japanese
• Published: 11.04.2019
• Subjects: ANALOGOUS ARRANGEMENTS USING OTHER WAVES; BASIC ELECTRIC ELEMENTS; COLORIMETRY; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION ORRERADIATION OF RADIO WAVES; MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT; MEASURING; PHYSICS; RADIATION PYROMETRY; RADIO DIRECTION-FINDING; RADIO NAVIGATION; SEMICONDUCTOR DEVICES; TESTING

To provide a photodetector which accurately performs optical detection even in a case where a subject distance range is wide, and to provide an optical detection device, a lidar device and a manufacturing method of the photodetector.SOLUTION: A photodetector comprises at least one first cell 1 which converts an incident light into electric charge, and at least one second cell 2 which converts an incident light into electric charge. The first cell 1 includes a first semiconductor layer 5, a second semiconductor layer 6, and a first substrate holding the first semiconductor layer 5 with the second semiconductor layer 6. The second cell 2 includes a third semiconductor layer 8, a fourth semiconductor layer 9, and a second substrate holding the third semiconductor layer 8 with the fourth semiconductor layer 9. The second substrate is thicker than the first substrate.SELECTED DRAWING: Figure 1 【課題】本発明の実施形態は、被写体距離範囲が広い場合でも、正確に光検出する本発明の実施形態は、被写体距離範囲が広い場合でも、正確に光検出する光検出器、光検出装置、ライダー装置及び光検出器の製造方法を提供する。【解決手段】上記の課題を達成するために、実施形態の光検出器は、入射した光を電荷に変換する、少なくとも一つの第１セル１と、入射した光を電荷に変換する、少なくとも一つの第２セル２と、を具備し、第１セル１は、第１半導体層５と、第２半導体層６と、第１半導体層５を第２半導体層６と挟む第１基板と、を含み、第２セル２は、第３半導体層８と、第４半導体層９と、第３半導体層８を第４半導体層９と挟む第２基板と、を含み、第２基板が、第１基板の厚さよりも厚い。【選択図】図１