VIBRATION DETECTOR

• Main Authors: ASAE KOJI, HARADA TOSHIICHI, OZAKI YUKIKATSU, MATSUI HIROHITO
• Format: Patent
• Language: English; Japanese
• Published: 11.04.2019
• Subjects: ELECTRICITY; MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC ORINFRASONIC WAVES; MEASURING; PHYSICS; TESTING

To provide a vibration detector capable of isolating and detecting vibrations acting in different directions.SOLUTION: A vibration detector 1 includes: a plurality of vibration sensor units 12 to 18; a weight 40 disposed on one surface of each of the vibration sensor units 12 to 18 in the thickness direction; and a control unit 50 that performs detection processing of information related to the vibration of the device TD on the basis of the sensor output from each of the vibration sensor units 12 to 18. Each of the vibration sensor units 12 to 18 is configured to include a film-like piezoelectric element 121 and a pair of film-like electrodes 122 and 123 disposed on both sides in the thickness direction of the piezoelectric element 121. The control unit 50 is configured to detect the vibration component in the thickness direction on the basis of the total value of the sensor output of each of the vibration sensor units 12 to 18, and vibration components in at least one direction in a plane orthogonal to the thickness direction on the basis of the output distribution of the sensor output of each of the vibration sensor units 12 to 18.SELECTED DRAWING: Figure 2 【課題】異なる方向に作用する振動を切り分けて検出することが可能な振動検出器を提供する。【解決手段】振動検出器１は、複数の振動センサ部１２〜１８と、各振動センサ部１２〜１８の厚み方向の一方の面に配置された錘４０と、各振動センサ部１２〜１８からのセンサ出力に基づいて、機器ＴＤの振動に関する情報の検出処理を行う制御部５０と、を備える。各振動センサ部１２〜１８それぞれは、フィルム状のピエゾ素子１２１およびピエゾ素子１２１の厚み方向の両面に配置されたフィルム状の一対の電極１２２、１２３を含んで構成されている。制御部５０は、各振動センサ部１２〜１８それぞれのセンサ出力の合算値に基づいて厚み方向の振動成分を検出し、各振動センサ部１２〜１８のセンサ出力の出力分布に基づいて厚み方向に直交する面内の少なくとも一方向の振動成分を検出する構成になっている。【選択図】図２