DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

• Main Authors: KUAH TENG HOCK, SONG KENG YEW, LIAO JIAN, YAN KAR WENG, DING JIAPEI, BIN YUAN, DEIVASIGAMANI MOULEESWARAN
• Format: Patent
• Language: English; Japanese
• Published: 04.04.2019
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

To provide a device for processing a semiconductor device.SOLUTION: A device 1 includes a first tool 100 including a stress constituent, a guide 150, and a spacer 120 moving in the guide 150. A gap 118 is defined between the spacer 120 and the, and can tilt the spacer 120 for the guide 150. The devi...