PRESSURE TEMPERATURE SENSOR

• Main Authors: AOKI FUMIAKI, OGINO KAZUMASA, ONO KAZUYUKI, YOSHIDA SHUNTARO
• Format: Patent
• Language: English; Japanese
• Published: 04.04.2019
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; MEASURING QUANTITY OF HEAT; MEASURING TEMPERATURE; PHYSICS; TESTING; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR

To provide a pressure temperature sensor which can detect both pressure and temperature and combines pressure measurement accuracy with temperature responsiveness, the pressure temperature sensor comprising a sensor chip constituted as a wafer-level package.SOLUTION: A portion of side surface of a m...