LIQUID INJECTION HEAD, LIQUID INJECTION DEVICE, AND PIEZOELECTRIC DEVICE

• Main Authors: HIRAI EIKI, TAKABE HONKI
• Format: Patent
• Language: English; Japanese
• Published: 04.04.2019
• Subjects: CORRECTION OF TYPOGRAPHICAL ERRORS; ELECTRICITY; i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; LINING MACHINES; PERFORMING OPERATIONS; PRINTING; SELECTIVE PRINTING MECHANISMS; STAMPS; TRANSPORTING; TYPEWRITERS

To provide a liquid injection head capable of improving displacement of a piezoelectric actuator, and a liquid injection device and a piezoelectric device.SOLUTION: A liquid injection head comprises: a flow passage formation substrate on which a plurality of pressure generation chambers are provided side-by-side in a first direction; and a piezoelectric actuator 300 having a common electrode provided via a diaphragm, a piezoelectric layer on the common electrode and an individual electrode on the piezoelectric layer. An active part 320 interposed between the common electrode and the individual electrode is provided for each pressure generation chamber. In a second direction perpendicular to the first direction of an in-plane of the flow passage formation substrate, an end portion of a first electrode 60 is provided closer to an outside than an end portion of a second electrode 80. An end portion of the piezoelectric layer is provided between the end portion of the first electrode and the end portion of the second electrode. In the second direction, lead-out wiring is provided from one end portion of the second electrode in the second direction. A groove part is provided between the active parts adjacent to each other in the first direction. In the second direction, an end portion of the groove part is positioned closer to an inside than an end portion of the lead-out wiring.SELECTED DRAWING: Figure 4 【課題】圧電アクチュエーターの変位を向上することができる液体噴射ヘッド、液体噴射装置、及び、圧電デバイスの提供。【解決手段】複数の圧力発生室が第１の方向に並設された流路形成基板と、振動板を介して設けられた共通電極と共通電極上の圧電体層と圧電体層上の個別電極とを有する圧電アクチュエーター３００とを具備し、共通電極と個別電極とで挟まれた活性部３２０が圧力発生室毎に設けられており、流路形成基板面内の第１の方向に直交する第２の方向において、第１電極６０の端部は第２電極８０の端部よりも外側に設けられており、圧電体層の端部は第１電極の端部と第２電極の端部との間に設けられており、第２の方向において、第２電極の一端部から第２の方向に引き出し配線が設けられており、第１の方向で互いに隣り合う活性部との間には、溝部が設けられており、第２の方向において、溝部の端部は、引き出し配線の端部よりも内側に位置する。【選択図】図４