LIQUID JET HEAD, LIQUID JET DEVICE, AND PIEZOELECTRIC DEVICE
To suppress breakage caused by infiltration of a liquid by improving adhesive strength between a protecting substrate and a channel member.SOLUTION: A liquid jet head includes: a nozzle plate 20 on which a nozzle array including first, second nozzle 21A and nozzle 21B is formed; a channel forming su...
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Main Authors | , |
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Format | Patent |
Language | English Japanese |
Published |
04.04.2019
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Subjects | |
Online Access | Get full text |
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Summary: | To suppress breakage caused by infiltration of a liquid by improving adhesive strength between a protecting substrate and a channel member.SOLUTION: A liquid jet head includes: a nozzle plate 20 on which a nozzle array including first, second nozzle 21A and nozzle 21B is formed; a channel forming substrate 10 on which first, second pressure generation chambers 12A, 12B for communicating with the first and second nozzles are formed; a diaphragm 50 which is formed on one surface side of the channel forming substrate; first and second piezoelectric elements 300A and 300B which are arranged in positions corresponding to the first and second pressure generation chambers on the diaphragm; a protecting substrate 30 which is joined to the channel forming substrate; a channel member 40 which is bonded to an opposite side to the channel forming substrate of the protecting substrate through an adhesive 43 and has a first channel 41 and a second channel 41; and a drive circuit 120 which is mounted between the first and second piezoelectric elements in a space 34 surrounded by the channel forming substrate, the protecting substrate, and the channel member. The drive circuit is bonded to the channel member with an adhesive 44.SELECTED DRAWING: Figure 3
【課題】保護基板と流路部材との接着強度を向上して、液体の浸入による破壊を抑制する。【解決手段】第1および第2のノズル21Aおよびノズル21Bを含むノズル列とが形成されたノズルプレート20と、第1および第2のノズルに連通する第1および第2の圧力発生室12Aおよび12Bとが形成された流路形成基板10と、流路形成基板の一方面側に形成された振動板50と、振動板上の第1および第2の圧力発生室に対応する位置に設けられた第1および第2の圧電素子300Aおよび300Bと、流路形成基板に接合された保護基板30と、保護基板の流路形成基板とは反対側に接着剤43を介して接着され、第1の流路41および第2の流路41とが形成された流路部材40と、流路形成基板と保護基板と流路部材とで囲まれた空間34内の第1および第2の圧電素子との間に実装された駆動回路120とを具備し、駆動回路は流路部材に接着剤44により接着される。【選択図】図3 |
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Bibliography: | Application Number: JP20170175474 |