POLISHING DEVICE, POLISHING METHOD, AND POLISHING CONTROLLER

• Main Authors: ONO SHUNICHI, MIKI TSUTOMU
• Format: Patent
• Language: English; Japanese
• Published: 28.03.2019
• Subjects: BASIC ELECTRIC ELEMENTS; DRESSING OR CONDITIONING OF ABRADING SURFACES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS; GRINDING; MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; PERFORMING OPERATIONS; POLISHING; SEMICONDUCTOR DEVICES; TRANSPORTING

To provide a polishing device that improves detection sensitivity of a polishing end point.SOLUTION: A polishing device comprises: an acoustic sensor; a sound collection part; an analysis part; a feature amount calculation part; and an end point determination part. The acoustic sensor detects polishing sound of a polishing object. The sound collection part collects polishing sound from the acoustic sensor. The analysis part performs frequency analysis of a power spectrum of the polishing sound with a prescribed time resolution. The feature amount calculation part calculates an arithmetic value of both power spectra being in a preset time difference relationship, using analysis data indicating an analysis result of the analysis part, as a feature amount of the polishing. The end point determination part determines a polishing end point of the polishing object, on the basis of a change of the feature amount.SELECTED DRAWING: Figure 1 【課題】研磨終点の検知感度を向上させることが可能な研磨装置を提供する。【解決手段】実施形態によれば、研磨装置は、音響センサと、音収集部と、分析部と、特徴量算出部と、終点判定部と、を備える。音響センサは、研磨対象物の研磨音を検出する。音収集部は、音響センサから研磨音を収集する。分析部は、所定の時間分解能で研磨音のパワースペクトルを周波数分析する。特徴量算出部は、分析部の分析結果を示す分析データを用いて、予め設定された時間差の関係にあるパワースペクトル同士の演算値を研磨の特徴量として算出する。終点判定部は、特徴量の変化に基づいて、研磨対象物の研磨終点を判定する。【選択図】図１