HEAT FLUX SENSOR AND ITS MANUFACTURING METHOD

To prevent oxidization of a first inter-layer connection member and a second inter-layer connection member.SOLUTION: A heat flux sensor comprises: an insulation base material 10 in which first and second veer holes 11, 12 are formed; a first inter-layer connection member 40 formed from sinter alloy...

Full description

Saved in:
Bibliographic Details
Main Authors SAKAIDA ATSUSUKE, WATANABE HAYATO, SHIRAISHI YOSHIHIKO, IMURA TOMOHIRO
Format Patent
LanguageEnglish
Japanese
Published 22.03.2019
Subjects
Online AccessGet full text

Cover

Loading…
More Information
Summary:To prevent oxidization of a first inter-layer connection member and a second inter-layer connection member.SOLUTION: A heat flux sensor comprises: an insulation base material 10 in which first and second veer holes 11, 12 are formed; a first inter-layer connection member 40 formed from sinter alloy disposed in each first veer hole 11; a second inter-layer connection member 50 formed from sinter alloy disposed in each second veer hole 12; a surface projection member 20 disposed on the surface 10a of the insulation base material 10 and having a surface pattern 21 on one surface 20a thereof; a rear-surface projection member 30 disposed on the rear surface 10b of the insulation base material and having a rear-surface pattern 31 on one surface 30a thereof. The surface protection member 20 has on the other surface 20b a surface barrier film 22 lower than the surface protection member 20 in terms of gas permeability. The rear-surface protection member 30 has on the other surface 30b a rear-surface barrier film 32 lower than the rear-surface protection member 30 in terms of oxidizable gas permeability.SELECTED DRAWING: Figure 2 【課題】第1層間接続部材および第2層間接続部材が酸化することを抑制する。【解決手段】第1、第2ビアホール11、12がそれぞれ複数形成された絶縁基材10と、第1ビアホール11に配置された焼結合金で構成される第1層間接続部材40と、第2ビアホール12に配置された焼結合金で構成される第2層間接続部材50と、絶縁基材10の表面10aに配置され、一面20aに表面パターン21が形成された表面保護部材20と、絶縁基材の裏面10bに配置され、一面30aに裏面パターン31が形成された裏面保護部材30と、を備え、表面保護部材20は、他面20bに表面保護部材20より酸化性の気体の透過率が低い表面バリア膜22が形成され、裏面保護部材30は、他面30bに裏面保護部材30より酸化性の気体の透過率が低い裏面バリア膜32が形成されている。【選択図】図2
Bibliography:Application Number: JP20170165845