SURFACE MEASURING DEVICE

• Main Author: HIROSE KAZUNORI
• Format: Patent
• Language: English; Japanese
• Published: 14.03.2019
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

To provide a surface measuring device that can simplify the positional adjustment before a measurement is made or the maintenance at a continual usage.SOLUTION: A surface measuring device 1 includes: a light source unit 2 for irradiating a surface Wa of a measurement target object W with light from a side; and a light reception unit 3 for receiving reflected light of the light emitted to the surface of the measurement target object by the light source unit. The light reception unit includes: a linear array sensor 30, which is arranged linearly in the same direction as the direction of the optical axis of the light source unit in a planar view to the surface; and a light reception lens 31 for collecting the reflected light into the linear array sensor, and measures the presence or absence of brightness on the surface on the basis of the output distribution of the light reception area in the linear array sensor.SELECTED DRAWING: Figure 1 【課題】測定前の位置決め調整や継続使用時のメンテナンスを簡略化することができる表面測定装置を提供する。【解決手段】表面測定装置１は、被測定物Ｗの表面Ｗａに対して斜めに光を照射する光源部２と、光源部が被測定物の表面に照射した光の反射光を受光する受光部３とを備え、受光部は、表面に対する平面視で光源部の光軸と同方向に延長配置されるリニアアレイセンサ３０と、リニアアレイセンサに反射光を集光する受光用レンズ３１とを備え、リニアアレイセンサにおける受光エリアの出力分布によって、表面の光沢有無を測定する。【選択図】図１