GAS PURGE UNIT AND GAS PURGE DEVICE

To provide a gas purge unit which conducts gas replacement in a purge object container uniformly, in particular, in a vertical direction, and to provide a gas purge device.SOLUTION: A gas purge unit 20 introduces a cleaning gas into a purge object container 2 having an opening 2b through the opening...

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Bibliographic Details
Main Authors EMOTO ATSUSHI, IWAMOTO TADAMASA
Format Patent
LanguageEnglish
Japanese
Published 07.03.2019
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:To provide a gas purge unit which conducts gas replacement in a purge object container uniformly, in particular, in a vertical direction, and to provide a gas purge device.SOLUTION: A gas purge unit 20 introduces a cleaning gas into a purge object container 2 having an opening 2b through the opening 2b. The gas purge unit 20 includes: a first nozzle port 26 which blows the cleaning gas from a side part of the opening 2b into the purge object container 2; and a second nozzle port 28 which blows the cleaning gas from the side part of the opening 2b along an opening surface of the opening 2b.SELECTED DRAWING: Figure 4A 【課題】パージ対象容器の内部を、特に上下方向で均一にガス置換することが可能なガスパージユニットおよびガスパージ装置を提供すること。【解決手段】開口２ｂを有するパージ対象容器２の内部に開口２ｂを通して清浄化ガスを導入させるガスパージユニット２０である。このガスパージユニット２０は、パージ対象容器２の内部に向けて、開口２ｂの側辺部から清浄化ガスを吹き出す第１ノズル口２６と、開口２ｂの開口面に沿って開口２ｂの側辺部から清浄化ガスを吹き出す第２ノズル口２８とを有する。【選択図】図４Ａ
Bibliography:Application Number: JP20180230203