HIGH FREQUENCY DECOMPRESSION DEVICE

To provide a high frequency decompression device capable of appropriately judging timing in which decompression is finished.SOLUTION: A high frequency decompression device 100 comprises: an electrode plate (an upper electrode 1 and a lower electrode 2); a high frequency power source 5 which supplies...

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Bibliographic Details
Main Authors KAMEYAMA HIROYUKI, TOMOMURA YOSHINOBU
Format Patent
LanguageEnglish
Japanese
Published 28.02.2019
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Summary:To provide a high frequency decompression device capable of appropriately judging timing in which decompression is finished.SOLUTION: A high frequency decompression device 100 comprises: an electrode plate (an upper electrode 1 and a lower electrode 2); a high frequency power source 5 which supplies high frequency power to the electrode plate; a matching circuit 6 which is disposed between the electrode plate and the high frequency power source 5; and a control part (control circuit 10) which controls operation of the high frequency power source 6. The matching circuit 6 includes: a first capacity variable capacitor (first capacitor 6a) which is connected in series to the electrode plate; and a second capacity variable capacitor (second capacitor 6b) which is connected in parallel to the electrode plate. The control part stops the operation of the high frequency power source 5 based on a capacity change of at least either the first capacity variable capacitor or the second capacity variable capacitor.SELECTED DRAWING: Figure 2 【課題】解凍を終了するタイミングを適切に判断することのできる高周波解凍装置を提供する。【解決手段】高周波解凍装置100は、電極板(上部電極1および下部電極2)と、電極板に高周波電力を供給する高周波電源5と、電極板と高周波電源5との間に配置されている整合回路6と、高周波電源6の動作を制御する制御部(制御回路10)とを備えている。整合回路6は、電極板に直列に接続されている第1の容量可変コンデンサ(第1のコンデンサ6a)と、電極板に並列に接続されている第2の容量可変コンデンサ(第2のコンデンサ6b)とを含む。制御部は、第1の容量可変コンデンサおよび第2の容量可変コンデンサの少なくとも何れかの容量変化に基づいて、高周波電源5の動作を停止する。【選択図】図2
Bibliography:Application Number: JP20170152222