LIQUID MICROMETER

• Main Authors: YOSHIKAWA KAZUHIRO, HASHIMOTO HITOMI, TSUZUKI TAKUYA
• Format: Patent
• Language: English; Japanese
• Published: 28.02.2019
• Subjects: MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

To provide a liquid micrometer using liquid.SOLUTION: The liquid micrometer comprises a liquid flowing path 30 for supplying liquid to a discharge nozzle 20 from liquid supply means 10, a flow sensor 40 provided on the liquid flowing path 30, a control valve 50 provided on the liquid flowing path 30 between the liquid supply means 10 and the flow sensor 40, a control unit 60 for controlling the control valve 50 so that a flow rate measured by the flow sensor 40 becomes a set value, a pressure sensor 70 for measuring pressure of liquid ejected from the discharge nozzle 20, and a calculation unit 80 for calculating dimension of a workpiece A using the pressure measured by the pressure sensor 70 in a state in which the flow rate is kept at the set value in the control unit.SELECTED DRAWING: Figure 1 【課題】液体を用いる液マイクロメータを提供すること。【解決手段】液体供給手段１０から吐出ノズル２０に液体を供給する液体流路３０と、液体流路３０に設けた流量センサー４０と、液体供給手段１０と流量センサー４０との間の液体流路３０に設けた制御バルブ５０と、流量センサー４０で計測される流量が設定値になるように制御バルブ５０を制御する制御部６０と、吐出ノズル２０から噴出される液体の圧力を計測する圧力センサー７０と、制御部で流量が設定値に保たれた状態での圧力センサー７０で計測される圧力からワークＡの寸法を演算する演算部８０とを有することを特徴とする。【選択図】 図１