OCT SYSTEM WITH BONDED MEMS TUNABLE MIRROR VCSEL SWEPT SOURCE

• Main Authors: MARK E KUZNETSOV, FLANDERS DALE C, WALID A ATIA, BARTLEY C JOHNSON
• Format: Patent
• Language: English; Japanese
• Published: 14.02.2019
• Subjects: BASIC ELECTRIC ELEMENTS; DEVICES USING STIMULATED EMISSION; ELECTRICITY

To provide an MEMS tunable VCSEL (Vertical-Cavity Surface-Emitting Laser) in which an MEMS mirror is bonded to an active region.SOLUTION: An MEMS tunable VCSEL 100 comprises: an active region substrate 112 having a plurality of active layers 118 amplifying light; and an optical membrane element 210...