OCT SYSTEM WITH BONDED MEMS TUNABLE MIRROR VCSEL SWEPT SOURCE

To provide an MEMS tunable VCSEL (Vertical-Cavity Surface-Emitting Laser) in which an MEMS mirror is bonded to an active region.SOLUTION: An MEMS tunable VCSEL 100 comprises: an active region substrate 112 having a plurality of active layers 118 amplifying light; and an optical membrane element 210...

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Bibliographic Details
Main Authors MARK E KUZNETSOV, FLANDERS DALE C, WALID A ATIA, BARTLEY C JOHNSON
Format Patent
LanguageEnglish
Japanese
Published 14.02.2019
Subjects
BASIC ELECTRIC ELEMENTS
DEVICES USING STIMULATED EMISSION
ELECTRICITY
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Summary:To provide an MEMS tunable VCSEL (Vertical-Cavity Surface-Emitting Laser) in which an MEMS mirror is bonded to an active region.SOLUTION: An MEMS tunable VCSEL 100 comprises: an active region substrate 112 having a plurality of active layers 118 amplifying light; and an optical membrane element 210 attached to the active region substrate. An optical membrane 212 of the optical membrane element 210 may flex and deform in a direction away from the active region substrate 112. The optical membrane 212 of the optical membrane element 210 may have a curved mirror structure.SELECTED DRAWING: Figure 3 【課題】ＭＥＭＳミラーを活性領域に接合してなるＭＥＭＳ波長可変ＶＣＳＥＬを提供する。【解決手段】ＭＥＭＳ波長可変ＶＣＳＥＬ１００は、光を増幅する複数の活性層１１８を有する活性領域基板１１２と、活性領域基板に取り付けられた光学メンブレン素子２１０とを備える。光学メンブレン素子２１０の光学メンブレン２１２は、活性領域基板１１２から離れる方向に撓み変形してもよい。光学メンブレン素子２１０の光学メンブレン２１２は、湾曲状のミラー構造を有してもよい【選択図】図３
Bibliography:Application Number: JP20180215954