FLOW SENSOR

• Main Authors: NAGIRA TSUMORU, NISHIYAMA MASAFUMI, NAGATOMO KENSHO, NAKAMURA KENZO, UBUKATA YASUHIRO, YANAGI SHIGENARI, CHITOSE NORIHISA
• Format: Patent
• Language: English; Japanese
• Published: 31.01.2019
• Subjects: MEASURING; MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL; METERING BY VOLUME; PHYSICS; TESTING

To provide a flow sensor capable of improving sensitivity while preventing degradation of detection sensitivity.SOLUTION: A flow sensor 1 disposed in piping P through which fluid flows, comprises: an upstream side cylindrical portion 2 which is connected to the piping at an upstream side; a downstream side cylindrical portion 3 which is connected to the piping at a downstream side; an intermediate cylindrical portion 4 for coupling the upstream side cylindrical portion and the downstream side cylindrical portion; an upstream side temperature sensor 5A disposed in the upstream side cylindrical portion; a downstream side temperature sensor 5B disposed in the downstream side cylindrical portion; and a heat generation body 6 which generates heat by means of electrical resistance, which is disposed in the downstream side cylindrical portion. The intermediate cylindrical portion is formed of a material the heat conductivity of which is smaller than those of the upstream side cylindrical portion and the downstream side cylindrical portion.SELECTED DRAWING: Figure 1 【課題】 検出感度の低下を抑制して感度の改善を図ることができるフローセンサを提供すること。【解決手段】 流体が流れる配管Ｐの途中に設置されるフローセンサ１であって、配管の上流側に接続される上流側筒部２と、配管の下流側に接続される下流側筒部３と、上流側筒部と下流側筒部とを連結する中間筒部４と、上流側筒部に設置された上流側温度センサ５Ａと、下流側筒部に設置された下流側温度センサ５Ｂと、下流側筒部に設置され電気抵抗により発熱する発熱体６とを備え、中間筒部が、上流側筒部及び下流側筒部よりも熱伝導率の小さい材料で形成されている。【選択図】図１