HIGH-FREQUENCY POWER SUPPLY DEVICE
To provide a high-frequency power supply device capable of reducing a conduction loss.SOLUTION: A high-frequency power supply device A1 comprises: an inverter circuit 21 that has a resonance circuit 31 obtained by series-connecting a capacitor C1 and an inductor L1; an inverter circuit 22 that has a...
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Main Authors | , |
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Format | Patent |
Language | English Japanese |
Published |
17.01.2019
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Subjects | |
Online Access | Get full text |
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Summary: | To provide a high-frequency power supply device capable of reducing a conduction loss.SOLUTION: A high-frequency power supply device A1 comprises: an inverter circuit 21 that has a resonance circuit 31 obtained by series-connecting a capacitor C1 and an inductor L1; an inverter circuit 22 that has a resonance circuit 32 obtained by series-connecting a capacitor C2 and an inductor L2; a control circuit 4 that controls an output by changing a phase difference between drive signals to be outputted to the inverter circuits 21 and 22; and a voltage limiting circuit 5 that limits increase of an inter-terminal voltage of the capacitors C1 and C2 more than a predetermined voltage.SELECTED DRAWING: Figure 1
【課題】導通損失を低減することができる高周波電源装置を提供する。【解決手段】高周波電源装置A1は、コンデンサC1とインダクタL1とを直列接続した共振回路31を有するインバータ回路21と、コンデンサC2とインダクタL2とを直列接続した共振回路32を有するインバータ回路22と、インバータ回路21,22に出力する駆動信号の位相差を変化させることで出力を制御する制御回路4と、コンデンサC1,C2の端子間電圧が所定電圧より大きくなることを制限する電圧制限回路5とを備えている。【選択図】図1 |
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Bibliography: | Application Number: JP20170126126 |