CONTAINER STORAGE DEVICE

• Main Author: SAKATA KATSUNORI
• Format: Patent
• Language: English; Japanese
• Published: 10.01.2019
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

To solve such a problem that, while a storage device is provided in limited space in the vicinity of processing units in order to eliminate a waiting time in each processing unit in a semiconductor manufacturing plant, the number of containers stored in conventional storage units is insufficient.SOLUTION: There is provided a storage device including: an orbiting mechanism which is arranged between an overhead hoist transport and a processing unit, and which supports a plurality of shelf boards each mounting a container for receiving a semiconductor wafer at a predetermined position and defines the orbit of the shelf boards; a drive mechanism driving the orbiting mechanism; and a control unit controlling the operation of the drive mechanism. The shelf boards are arranged so as to be capable of passing above a container mounting table included in the processing unit, and the orbiting mechanism is provided with an area where the container moving up and down between the overhead hoist transport and the container mounting table can pass.SELECTED DRAWING: Figure 10 【課題】半導体製造工場において各処理装置の待ち時間を解消するために、処理装置近傍の限られたスペースに貯蔵装置を設けることが行われているが、従来の貯蔵装置では貯蔵する容器の数が不足している。【解決手段】天井走行車と処理装置との間に配置され、半導体ウエハを収容する容器を所定の位置に載置する棚板を複数支持して、棚板の周回軌道を規定する周回機構と、前記周回機構を駆動する駆動機構と、駆動機構の動作を制御する制御部とを備え、前記棚板は、前記処理装置が備える容器載置台の上方を通過可能に配置され、且つ、前記周回機構には、前記天井走行車と前記容器載置台との間で昇降移動する前記容器が通過可能な領域が設けられている貯蔵装置を提供する。【選択図】図１０