FLUORINE-CONTAINING MONOMER, FLUORINE-CONTAINING POLYMER, COMPOSITION FOR PATTERN FORMATION USING THE SAME, AND PATTERN FORMATION METHOD

• Main Authors: ITAKURA TSUBASA, NADANO RYO, KANEKO YUZURU
• Format: Patent
• Language: English; Japanese
• Published: 27.12.2018
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CHEMISTRY; CINEMATOGRAPHY; COMPOSITIONS BASED THEREON; ELECTROGRAPHY; HETEROCYCLIC COMPOUNDS; HOLOGRAPHY; MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVINGCARBON-TO-CARBON UNSATURATED BONDS; MATERIALS THEREFOR; METALLURGY; ORGANIC CHEMISTRY; ORGANIC MACROMOLECULAR COMPOUNDS; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; THEIR PREPARATION OR CHEMICAL WORKING-UP

To provide a fluorine-containing polymer containing no perfluoroalkyl group having 4 or more carbon atoms, providing a pattern with high sensitivity and high resolution.SOLUTION: There is provided a fluorine-containing polymer containing a repeating unit represented by the formula (1). In the formula, Ris a hydrogen atom, a fluorine atom, an alkyl group having 1 to 10 carbon atoms, Rto Rare a hydrogen atom, an alkyl group having 1 to 10 carbon atoms, X is a single bond or a bivalent group, Y is a fluorine-containing alkyl group having 1 to 3 carbon atoms, or a carbonic acid ester group (-COOR), R is a fluorine-containing alkyl group having 1 to 3 carbon atoms. 7 or less hydrogen atoms contained in these groups may be substituted by a fluorine atom.SELECTED DRAWING: None 【課題】高感度且つ高解像度のパターンを与える炭素数４以上のパーフルオロアルキル基を含まない含フッ素重合体を提供する。【解決手段】式（１）で表される繰り返し単位を含む、含フッ素重合体。（式中、Ｒ１は水素原子、フッ素原子または炭素数１〜１０のアルキル基であり、Ｒ２〜Ｒ５は水素原子、炭素数１〜１０のアルキル基であり、Ｘは、単結合または２価の基であり、Ｙは、炭素数１〜３の含フッ素アルキル基、またはカルボン酸エステル基(−ＣＯＯＲ)であり、Ｒは、炭素数１〜３の含フッ素アルキル基である。これらの基が含む７個以下の水素原子がフッ素原子で置換されていてもよい。）【選択図】なし