DIFFERENTIAL PRESSURE CHAMBER INTERCONNECTION DEVICE AND DIFFERENTIAL PRESSURE CHAMBER INTERCONNECTION METHOD

• Main Author: IMAO HIROSHI
• Format: Patent
• Language: English; Japanese
• Published: 06.12.2018
• Subjects: ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GAMMA RAY OR X-RAY MICROSCOPES; IRRADIATION DEVICES; NUCLEAR ENGINEERING; NUCLEAR PHYSICS; PHYSICS; PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS; TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR

To improve vacuum sealing performance between differential pressure chambers, by suppressing inflow of gas in a high pressure side differential pressure chamber to a low pressure side differential pressure chamber, when sucking multiple differential pressure chambers so that the pressure of the differential pressure chambers lowers according to the order of arrangement of the multiple differential pressure chambers.SOLUTION: A differential pressure chamber interconnection device 10 includes differential pressure chambers 1a-1d, a suction device V, a passage formation body 3 and a gas jet device 5. The differential pressure chambers 1a-1d are arranged in order so as to be interconnected. The suction device V sucks some or all of the multiple differential pressure chambers 1a-1d so that the pressure of the differential pressure chambers 1a-1d decreases according to the order of arrangement, and the pressure difference of the first and last differential pressure chambers in the arrangement order becomes sufficiently large. The passage formation body 3 forms an interconnection path 3a for jet supply interconnecting two adjoining differential pressure chambers 1b, 1c. The gas jet device 5 supplies gas jet J to the interconnection path 3a so that the gas jet J traverses the interconnection path 3a.SELECTED DRAWING: Figure 2 【課題】複数の差圧室の配置の順番に従って差圧室の圧力が低くなるように複数の差圧室を吸引する場合に、高圧側の差圧室のガスが低圧側の差圧室へ流入することを抑え、差圧室間の真空封止性能を高められるようにする。【解決手段】差圧室連通装置１０は、差圧室１ａ〜１ｄと吸引装置Ｖと通路形成体３とガスジェット装置５を備える。差圧室１ａ〜１ｄは、互いに連通するように順番に配置される。吸引装置Ｖは、配置の順番に従って差圧室１ａ〜１ｄの圧力が低くなるように、且つ、配置の順番における最初と最後の差圧室の圧力差が十分に大きくなるように複数の差圧室１ａ〜１ｄの一部又は全部を吸引する。通路形成体３は、隣接する２つの差圧室１ｂ、１ｃを互いに連通するジェット供給用の連通路３ａを形成する。ガスジェット装置５は、連通路３ａをガスジェットＪが横断するように連通路３ａにガスジェットＪを供給する。【選択図】図２