HEATER CONTROL MECHANISM, HEAT TREATMENT EQUIPMENT AND HEATER CONTROL METHOD

PROBLEM TO BE SOLVED: To improve temperature variation in a processing chamber by a heater control mechanism of simple structure.SOLUTION: A heater control mechanism 1 for controlling operation of multiple heaters 2a-2d provided in a heat treatment equipment 20 performing heat treatment of a work W...

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Bibliographic Details
Main Authors NAGAISHI AKIHIRO, SHIBATA DAIKI
Format Patent
LanguageEnglish
Japanese
Published 29.11.2018
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Summary:PROBLEM TO BE SOLVED: To improve temperature variation in a processing chamber by a heater control mechanism of simple structure.SOLUTION: A heater control mechanism 1 for controlling operation of multiple heaters 2a-2d provided in a heat treatment equipment 20 performing heat treatment of a work W is provided with a first switch 4 for switching all heaters 2a-2d ON/OFF, a second switch 5 for switching some heaters 2c, 2d, out of the multiple heaters 2a-2d, ON/OFF, and a control section 6 configured to give an operation instruction for switching ON/OFF to the first and second switches 4, 5 based on the temperature information in a processing chamber 21 for housing the work W. The control section 6 is further configured to calculate the operation time of the heater based on the temperature information in the processing chamber 21, and to give an operation instruction based on the calculated operation time to at least the second switch 5, out of the first and second switches 4, 5.SELECTED DRAWING: Figure 2 【課題】簡易な構造のヒータ制御機構で処理室内の温度ばらつきを改善する。【解決手段】ワークWの熱処理を行う熱処理装置20に設けられた複数のヒータ2a〜2dの動作を制御するヒータ制御機構1において、全てのヒータ2a〜2dのONとOFFを切り替える第1スイッチ4と、複数のヒータ2a〜2dのうち、一部のヒータ2c、2dのONとOFFを切り替える第2スイッチ5と、ワークWが収容される処理室21内の温度情報に基づいて第1スイッチ4および第2スイッチ5にONとOFFを切り替える動作指示を与えるように構成された制御部6とを設け、制御部6がさらにワークWが収容される処理室21内の温度情報に基づいてヒータの作動時間を算出し、算出された作動時間に基づく動作指示を、第1スイッチ4および第2スイッチ5のうち、少なくとも第2スイッチ5に与えるように構成する。【選択図】図2
Bibliography:Application Number: JP20170090554