PROCESSOR, ABNORMALITY DETECTION METHOD, AND RECORDING MEDIUM

• Main Authors: NAKAMIZO KENJI, KOMIYA YOJI, TANAKA AKIYOSHI, ANDO RYOJI, SUNAKA IKUO, MASAKI YOICHI, MORITA SATOSHI, NAKAJIMA MIKIO, FUKUDA KOSUKE
• Format: Patent
• Language: English; Japanese
• Published: 22.11.2018
• Subjects: BASIC ELECTRIC ELEMENTS; CONTROLLING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MEASURING; MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL; METERING BY VOLUME; PHYSICS; REGULATING; SEMICONDUCTOR DEVICES; SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES; TESTING

PROBLEM TO BE SOLVED: To detect abnormality of a flow passage opening and closing part.SOLUTION: A processor according to one aspect of an embodiment includes a chamber, a nozzle, a flow measurement part, a flow passage opening and closing part, and a control part. The chamber stores a processed body. The nozzle is provided in the chamber and supplies a processing liquid toward the processed body. The flow measurement part measures a flow amount of the processing liquid supplied to the nozzle. The flow passage opening and closing part performs opening and closing of a flow passage through which the processing liquid is supplied to the nozzle. The control part outputs a closing signal for causing the flow passage opening and closing part to perform closing operation of closing the supply flow passage. The control part also detects operation abnormality of the flow passage opening and closing part on the basis of an integrated amount of the flow amounts measured by the flow measurement part after the outputting of the closing signal.SELECTED DRAWING: Figure 8 【課題】流路開閉部の異常を検知すること。【解決手段】実施形態の一態様に係る処理装置は、チャンバと、ノズルと、流量測定部と、流路開閉部と、制御部とを備える。チャンバは、被処理体を収容する。ノズルは、チャンバ内に設けられ、被処理体へ向けて処理液を供給する。流量測定部は、ノズルに供給される処理液の流量を測定する。流路開閉部は、ノズルへの処理液の供給流路の開閉を行う。制御部は、流路開閉部に対し、供給流路を閉じる閉動作を行わせる閉信号を出力する。また、制御部は、閉信号の出力後に流量測定部によって測定された流量の積算量に基づき、流路開閉部の動作異常を検知する。【選択図】図８