PHOTOSENSITIVE RESIN COMPOSITION AND RESIN FILM

PROBLEM TO BE SOLVED: To provide a photosensitive resin composition useful for preparing an electronic device having a resin film which is excellent in a balance among corrosion resistance, patterning properties, preservability and chemical resistance, and can maintain an appearance even when a pres...

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Bibliographic Details
Main Authors OTANI SHOICHIRO, KAWANAMI TAKUSHI, IKEDA TAKUJI
Format Patent
LanguageEnglish
Japanese
Published 22.11.2018
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
CHEMISTRY
CINEMATOGRAPHY
COMPOSITIONS BASED THEREON
ELECTROGRAPHY
HOLOGRAPHY
MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONSONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
MATERIALS THEREFOR
METALLURGY
ORGANIC MACROMOLECULAR COMPOUNDS
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
THEIR PREPARATION OR CHEMICAL WORKING-UP
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Summary:PROBLEM TO BE SOLVED: To provide a photosensitive resin composition useful for preparing an electronic device having a resin film which is excellent in a balance among corrosion resistance, patterning properties, preservability and chemical resistance, and can maintain an appearance even when a pressure cooker test is performed.SOLUTION: A photosensitive resin composition contains an alkali-soluble resin, a photoacid generator, a thermal acid generator, and a thermal crosslinking agent, where the thermal acid generator is an aromatic sulfonium salt, and has a pH measured on the following condition of 1.3 or more and 3.5 or less (condition: crushing a cured product obtained by curing the photosensitive resin composition on conditions of 230°C and 30 minutes in a mortar to obtain a crushed product, then placing the crushed product in ultrapure water of 5 times volume of the crushed product, and measuring a pH of a hot water extract obtained by heating the ultrapure water at 125°C for 20 hours).SELECTED DRAWING: None 【課題】耐腐食性、パターニング性、保存性および耐薬品性のバランスに優れており、かつプレッシャークッカー試験を実施した場合においても外観を維持できる樹脂膜を備えた電子装置を作製するために有用な感光性樹脂組成物を提供する。【解決手段】アルカリ可溶性樹脂と、光酸発生剤と、熱酸発生剤と、熱架橋剤と、を含む感光性樹脂組成物であって、前記熱酸発生剤が芳香族スルホニウム塩であり、以下の条件で測定されるｐＨが１．３以上３．５以下である。（条件：当該感光性樹脂組成物を２３０℃、３０分の条件で硬化させた硬化物を乳鉢で粉砕し粉砕物を得る。次いで、前記粉砕物を、前記粉砕物の５倍量の超純水中に入れた後、前記超純水を１２５℃で２０時間熱することにより得られた熱水抽出液のｐＨを測定する。）【選択図】なし
Bibliography:Application Number: JP20170088626