FORCE SENSOR DEVICE

• Main Authors: TAKI TOMOHITO, YAMAGUCHI SHINYA
• Format: Patent
• Language: English; Japanese
• Published: 22.11.2018
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

PROBLEM TO BE SOLVED: To reduce variations in the output of a sensor chip caused by stress generated when the force sensor device is attached to a fixing target part.SOLUTION: The force sensor device includes: a sensor chip for detecting a displacement in specific axis-directions; and a strain body for conveying an applied force to the sensor chip, the strain body including a sensor chip equipment part, to which the sensor chip is equipped; and a plurality of columns separate from one another around the sensor chip equipment part, and the sensor chip equipment part being fixed to the columns by a connection beam.SELECTED DRAWING: Figure 2 【課題】力覚センサ装置を被固定部に取り付ける際に生じる応力に起因するセンサチップの出力の変動を低減すること。【解決手段】本力覚センサ装置は、複数の所定の軸方向の変位を検知するセンサチップと、印加された力を前記センサチップに伝達する起歪体と、を有する力覚センサ装置であって、前記起歪体は、前記センサチップを搭載するセンサチップ搭載部と、前記センサチップ搭載部の周囲に離間して配置された複数の柱と、を備え、前記センサチップ搭載部は、接続用梁を介して、各々の前記柱に固定されている。【選択図】図２