CHUCK DEVICE

PROBLEM TO BE SOLVED: To provide a chuck device having a separation device capable of easily separating a work joined by water film.SOLUTION: A chuck device comprises a chuck 10 having a flat surface to which a work 40 or a support body 43 fixed on the work 40 is joined by a water film W of 1000 nm...

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Bibliographic Details
Main Authors BANDO TSUBASA, YAMAMOTO EIICHI, UNE ATSUNOBU
Format Patent
LanguageEnglish
Japanese
Published 22.11.2018
Subjects
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Summary:PROBLEM TO BE SOLVED: To provide a chuck device having a separation device capable of easily separating a work joined by water film.SOLUTION: A chuck device comprises a chuck 10 having a flat surface to which a work 40 or a support body 43 fixed on the work 40 is joined by a water film W of 1000 nm or less, and a separation device for reducing holding power of the water film W so that the work 40 or the support body 43 fixed on the flat surface can be separated from the flat surface. The separation device is heaters 21, 121 and 221 for heating and evaporating the water film W. Alternatively, the separation device is a fluid supply device 335 for supplying water or air to the flat surface from a groove 333 or a pore. By providing the separation device, the work 40 can be easily separated without applying excessive force to the work 40.SELECTED DRAWING: Figure 2 【課題】水膜で接合されたワークを容易に剥離することができる分離装置を備えたチャック装置を提供する。【解決手段】ワーク40またはワーク40に固定された支持体43が1000nm以下の水膜Wによって接合される平坦面を有するチャック10と、平坦面に固定されたワーク40または支持体43を平坦面から剥離可能となるように水膜Wによる保持力を低下させる分離装置と、を備える。分離装置は、水膜Wを加熱して蒸発させる加熱装置21、121、221である。または、分離装置は、溝333または細孔から平坦面に水または空気を供給する流体供給装置335である。分離装置を備えることにより、ワーク40に過大な力を加えることなくワーク40を容易に剥離することができる。【選択図】図2
Bibliography:Application Number: JP20170088043