DRIVING STAGE DEVICE AND DRIVING CONTROL METHOD

• Main Authors: KANEMATSU TOSHIHIRO, HONDA HIROOMI
• Format: Patent
• Language: English; Japanese
• Published: 15.11.2018
• Subjects: BEARINGS; BLASTING; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT; DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING; ELEMENTS OR CRANKSHAFT MECHANISMS; ENGINEERING ELEMENTS AND UNITS; FLEXIBLE SHAFTS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS; HEATING; LIGHTING; MACHINE TOOLS; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; MECHANICAL ENGINEERING; METAL-WORKING NOT OTHERWISE PROVIDED FOR; PERFORMING OPERATIONS; PHYSICS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; SHAFTS; TESTING; THERMAL INSULATION IN GENERAL; TRANSPORTING; WEAPONS

PROBLEM TO BE SOLVED: To provide a method of controlling a driving stage device that can actualize proper driving control according to the weight of an object placed on a stage and so on.SOLUTION: A stage is floated by an air bearing, and a height of the stage being floated by the air bearing is measured as a first height ST121. A work is mounted on the stage ST122, and a height of the stage having the work mounted is measured as a second height ST123. A difference between the first height and the second height is calculated as a sinking quantity ST124, and a weight of the work is calculated based upon the sinking quantity ST125. An upper-limit speed of rotary driving or horizontal movement of the stage is determined based upon the calculated work weight. The speed of the rotary driving or horizontal movement of the stage is controlled not to exceed the upper-limit speed.SELECTED DRAWING: Figure 5 【課題】ステージ上に載せられた対象物の重量などに応じ、適切な駆動制御を実現できる駆動ステージ装置の制御方法を提供する。【解決手段】ステージをエアベアリングで浮上させ、エアベアリングで浮上した状態のステージの高さを第１高さとして測定するＳＴ１２１。ステージにワークを載置しＳＴ１２２、ワークが載置された状態で前記ステージの高さを第２高さとして測定するＳＴ１２３。第１高さと第２高さとの差を沈み量として算出しＳＴ１２４、沈み量に基づいてワークの重量を算出するＳＴ１２５。前記算出されたワーク重量に基づいてステージの回転駆動あるいは水平移動の上限速度を決定する。ステージの回転駆動あるいは水平移動の速さが前記上限速度を超えないように制御する。【選択図】図５