ROOTS TYPE VACUUM PUMP AND OPERATION METHOD OF ROOTS TYPE VACUUM PUMP

• Main Authors: OBUCHI SHINJI, TAKATO CHIKAKO, NOMI MOTOHIKO
• Format: Patent
• Language: English; Japanese
• Published: 08.11.2018
• Subjects: BLASTING; HEATING; LIGHTING; MECHANICAL ENGINEERING; POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENTMACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENTPUMPS; WEAPONS

PROBLEM TO BE SOLVED: To provide a Roots type vacuum pump having high versatility and capable of efficiently preventing liquefaction and solidification of gas, and a method for operating the Roots type vacuum pump.SOLUTION: A Roots type vacuum pump 1 comprises a plurality of pump chambers 40c in which Roots type rotors 51 are arranged, compresses and exhausts sucked gas in multiple stages in the plurality of pump chambers 40c, and comprises a compressed gas return device 70 for returning a portion of compressed gas exhausted from at least one pump chamber 40c out of the plurality of pump chambers 40c to the suction side of the pump chamber 40c.SELECTED DRAWING: Figure 2 【課題】汎用性が高く、効率的にガスの液化、固化を防止できるルーツ型真空ポンプ及びルーツ型真空ポンプの運転方法の提供。【解決手段】ルーツ型真空ポンプ１は、ルーツ型のロータ５１が配置された複数のポンプ室４０ｃを有し、吸気したガスを複数のポンプ室４０ｃで多段圧縮して排気するルーツ型真空ポンプ１であって、複数のポンプ室４０ｃのうち、少なくともいずれか一つのポンプ室４０ｃから排出された圧縮ガスの一部を、当該ポンプ室４０ｃよりも吸気側に返送する圧縮ガス返送装置７０を有する。【選択図】図２