OBSERVATION DEVICE

PROBLEM TO BE SOLVED: To provide an observation device capable of observing a sample from various directions.SOLUTION: An observation device 100 according to an aspect of the present invention comprises a rotation shaft 11 provided so as to be rotatable around a first axis, a φ axis motor 147 for ro...

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Bibliographic Details
Main Author OIDE TAKAHIRO
Format Patent
LanguageEnglish
Japanese
Published 01.11.2018
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Summary:PROBLEM TO BE SOLVED: To provide an observation device capable of observing a sample from various directions.SOLUTION: An observation device 100 according to an aspect of the present invention comprises a rotation shaft 11 provided so as to be rotatable around a first axis, a φ axis motor 147 for rotating the rotation shaft 11, an arm 12 attached to the rotation shaft 11 and provided with a first guide mechanism 15, an optical system unit 110 provided so as to be movable along the guide mechanism 15 and having a scanner for scanning irradiation light with which a sample is irradiated, an objective lens 120 attached on the sample side of the optical system unit 110 and condensing the irradiation light scanned by the scanner onto the sample, and a θ axis motor 145 moving the optical system unit 110 along the guide mechanism 15 so that the objective lens 120 rotatably moves around an observation center point O on an extended line of the first axis.SELECTED DRAWING: Figure 1 【課題】サンプルを様々な方向から観察可能な観察装置を提供する。【解決手段】本発明の一態様にかかる観察装置100は、第1の軸周りに回転可能に設けられた回転軸11と、回転軸11を回転させるφ軸モータ147と、回転軸11に取り付けられたアーム12であって、ガイド機構15が設けられたアーム12と、第1のガイド機構15に沿って移動可能に設けられた光学系ユニット110であって、サンプルに照射される照射光を走査するスキャナを有する光学系ユニット110と、光学系ユニット110のサンプル側に取り付けられ、スキャナで走査された照射光をサンプルに集光する対物レンズ120と、対物レンズ120が第1の軸の延長線上にある観察中心点O周りに回転移動するように、光学系ユニット110をガイド機構15に沿って移動させるθ軸モータ145と、を備えたものである。【選択図】図1
Bibliography:Application Number: JP20170068311