POLISHING PAD
To provide a polishing pad that has improved polishing uniformity and can flatten the surface of a polishing object while suppressing scratches on the polishing object.SOLUTION: A polishing pad has a polyurethane foam sheet that includes a plurality of tear-shaped bubbles formed by wet deposition as...
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Main Authors | , |
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Format | Patent |
Language | English Japanese |
Published |
01.11.2018
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Subjects | |
Online Access | Get full text |
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