FOCUSED ION BEAM DEVICE

PROBLEM TO BE SOLVED: To provide a focused ion beam device capable of suppressing slow-down of a tip of an emitter.SOLUTION: A focused ion beam device performs a first maintenance processing for cooling an emitter by a cooling device after a temperature of the emitter and a temperature of an inner s...

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Bibliographic Details
Main Authors MATSUDA OSAMU, NAGAHARA KOJI, KOSAKAI TOMOKAZU, KAWANAMI YOSHIMI, OBA HIROSHI, SHIINA KENSUKE
Format Patent
LanguageEnglish
Japanese
Published 25.10.2018
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Summary:PROBLEM TO BE SOLVED: To provide a focused ion beam device capable of suppressing slow-down of a tip of an emitter.SOLUTION: A focused ion beam device performs a first maintenance processing for cooling an emitter by a cooling device after a temperature of the emitter and a temperature of an inner side of a housing cooled with the emitter are raised by a first heating device in each timing when a first period predetermined is passed.SELECTED DRAWING: Figure 4 【課題】エミッターの先端の鈍化を抑制することができる集束イオンビーム装置を提供すること。【解決手段】集束イオンビーム装置は、予め決められた第１期間が経過する毎に、第１加熱装置によってエミッター及びエミッターとともに冷却される筐体の内側の温度を上昇させた後、冷却装置によってエミッターを冷却する第１メンテナンス処理を行う。【選択図】図４
Bibliography:Application Number: JP20170062505