CROSS SECTION OBSERVATION DEVICE, AND CONTROL METHOD

• Main Authors: AZUMA JUNZO, MITSU KIN
• Format: Patent
• Language: English; Japanese
• Published: 18.10.2018
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

PROBLEM TO BE SOLVED: To provide a cross section observation device capable of easily comparing multiple cross-sectional images that are acquired on the basis of different observation conditions for cross sections of an object.SOLUTION: A cross section observation device is configured to iteratively expose cross sections of an object by irradiating the object with a charged particle beam, irradiate at least partial cross sections among exposed multiple cross sections with charged particle beams, thereby acquiring cross-sectional image information representing each of the at least partial cross sections, generate a cross-sectional image for each cross section represented by each of the acquired cross-sectional image information, and generate a three-dimensional image overlapping the generated cross-sectional images. In the cross section observation device, together with a first three-dimensional image that is a three-dimensional image obtained by overlapping a first cross-sectional image that is a cross-sectional image of a cross section represented by each of cross-sectional image information acquired on the basis of a first condition, a second three-dimensional image that is a three-dimensional image obtained by overlapping a second cross-sectional image that is a cross-sectional image of a cross section represented by each of cross-sectional image information acquired on the basis of a second condition is displayed.SELECTED DRAWING: Figure 3 【課題】物体の断面についてそれぞれ異なる観察条件に基づいて取得された複数の断面像同士を容易に比較させることができる断面観察装置を提供すること。【解決手段】断面観察装置は、物体に荷電粒子ビームを照射して物体の断面を繰り返し露出させるとともに、露出させた複数の当該断面のうちの少なくとも一部の断面に荷電粒子ビームを照射して当該少なくとも一部の断面のそれぞれを表す断面像情報を取得し、取得した断面像情報のそれぞれが表す当該断面毎の断面像を生成し、生成した断面像のそれぞれを重ね合わせた三次元像を生成する断面観察装置であって、第１の条件に基づいて取得した断面像情報のそれぞれが表す当該断面の断面像である第１断面像を重ね合わせた三次元像である第１三次元像とともに、第２の条件に基づいて取得した断面像情報のそれぞれが表す当該断面の断面像である第２断面像を重ね合わせた三次元像である第２三次元像を表示する。【選択図】図３