VACUUM PUMP, MAIN SENSOR, AND THREAD GROOVE STATOR

• Main Author: KABASAWA TSUYOSHI
• Format: Patent
• Language: English; Japanese
• Published: 11.10.2018
• Subjects: BLASTING; HEATING; LIGHTING; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; MECHANICAL ENGINEERING; NON-POSITIVE DISPLACEMENT PUMPS; PHYSICS; POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS; TESTING; WEAPONS

PROBLEM TO BE SOLVED: To provide a vacuum pump which has a sensor capable of sensing a precipitate deposited to a predetermined thickness in a flow passage even when the chemical composition of the precipitate cannot be specified.SOLUTION: A vacuum pump 1 includes: a rotational part and a fixed part...