VACUUM PUMP, MAIN SENSOR, AND THREAD GROOVE STATOR

PROBLEM TO BE SOLVED: To provide a vacuum pump which has a sensor capable of sensing a precipitate deposited to a predetermined thickness in a flow passage even when the chemical composition of the precipitate cannot be specified.SOLUTION: A vacuum pump 1 includes: a rotational part and a fixed part...

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Bibliographic Details
Main Author KABASAWA TSUYOSHI
Format Patent
LanguageEnglish
Japanese
Published 11.10.2018
Subjects
BLASTING
HEATING
LIGHTING
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
MECHANICAL ENGINEERING
NON-POSITIVE DISPLACEMENT PUMPS
PHYSICS
POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS
PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
TESTING
WEAPONS
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Summary:PROBLEM TO BE SOLVED: To provide a vacuum pump which has a sensor capable of sensing a precipitate deposited to a predetermined thickness in a flow passage even when the chemical composition of the precipitate cannot be specified.SOLUTION: A vacuum pump 1 includes: a rotational part and a fixed part arranged with an inner flow passage in between; a discharge mechanism for sending gas from an inlet port to a discharge port through the inner flow passage; and a main sensor 42 for detecting a precipitate deposited to a predetermined thickness in a detection target position of the inner flow passage; the main sensor 42 having at least one pair of electrodes 54 and 56 arranged in the inner flow passage at an interval which corresponds to the predetermined thickness and a capacitance detection circuit 46 connected to the pair of electrodes 54 and 56, the circuit detecting the capacitance between the electrodes 54 and 56, the capacitance detection circuit 46 determining that the thickness of the precipitate in the inner flow passage has reached a specific thickness on the basis of reduction of the increase rate of the capacitance.SELECTED DRAWING: Figure 2 【課題】流路内の析出物の化学組成を特定でない場合であっても、流路内に析出物が所定の厚さまで堆積したことを検知することができるセンサを備えた真空ポンプを提供する。【解決手段】真空ポンプ１は、間に内部流路が形成された回転部及び固定部と、ガスを吸入口から内部流路を通じて排気口に向けて送る排気機構と、内部流路の検出対象位置において堆積物が所定の厚さに達したことを検出するための主センサ４２と、を有する真空ポンプ１であって、主センサ４２は、所定の厚さに対応する間隔で内部流路に配置された少なくとも一対の電極５４、５６と、一対の電極５４、５６に接続され、一対の電極５４、５６間の静電容量を検出する静電容量検出回路４６と、を有し、静電容量検出回路４６は、静電容量の増加率が低下したことに基づき、内部流路内の堆積物が所定の厚さに達したと判定する。【選択図】図２
Bibliography:Application Number: JP20170057192