SEMICONDUCTOR STORAGE DEVICE

PROBLEM TO BE SOLVED: To provide a semiconductor storage device having a high reliability.SOLUTION: A semiconductor storage device comprises: a semiconductor member that extends in a first direction; first wiring that extends in a second direction crossing the first direction; and a first electrode...

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Bibliographic Details
Main Authors NAGASHIMA MASASHI, KATO TATSUYA, ARAI FUMITAKA, SAKAIKE KOHEI
Format Patent
LanguageEnglish
Japanese
Published 04.10.2018
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PROBLEM TO BE SOLVED: To provide a semiconductor storage device having a high reliability.SOLUTION: A semiconductor storage device comprises: a semiconductor member that extends in a first direction; first wiring that extends in a second direction crossing the first direction; and a first electrode arranged between the semiconductor member and the first wiring. A curvature radius of a corner part opposed to the semiconductor member in the first electrode is larger than that of a corner part opposed to the first wiring in the first electrode.SELECTED DRAWING: Figure 4 【課題】信頼性が高い半導体記憶装置を提供する。【解決手段】半導体記憶装置は、第１方向に延びる半導体部材と、前記第１方向に対して交差した第２方向に延びる第１配線と、前記半導体部材と前記第１配線との間に配置された第１電極と、を備える。前記第１電極における前記半導体部材に対向した角部の曲率半径は、前記第１電極における前記第１配線に対向した角部の曲率半径よりも大きい。【選択図】図４
Bibliography:Application Number: JP20170050087