LAMINATE COATING FILM AND METHOD OF MANUFACTURING THE SAME, AND PISTON RING

• Main Authors: SHIBATA AKINOBU, MORIGUCHI HIDEKI
• Format: Patent
• Language: English; Japanese
• Published: 04.10.2018
• Subjects: ARRANGEMENTS OF SEALINGS IN COMBUSTION ENGINES; BLASTING; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; COMBUSTION ENGINES; CYLINDERS; CYLINDERS, PISTONS OR CASINGS, FOR COMBUSTION ENGINES; DIFFUSION TREATMENT OF METALLIC MATERIAL; ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS; HEATING; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; LAYERED PRODUCTS; LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM; LIGHTING; MECHANICAL ENGINEERING; METALLURGY; PERFORMING OPERATIONS; PISTONS; SEALINGS; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; THERMAL INSULATION IN GENERAL; TRANSPORTING; WEAPONS

PROBLEM TO BE SOLVED: To provide a film deposition technique such that a CrN layer can be coated with a hard carbon layer through a series of processes in the same film deposition apparatus, and superior slide characteristics can be stably secured by making the hard carbon layer exhibit its low friction as well as wear resistance and peeling resistance that the CrN layer has by securing adhesion of the hard carbon layer to the CrN layer more than before.SOLUTION: The present invention relates to a laminate coating film which has a CrN layer formed as a ground layer on a base material and also has a hard carbon layer laminated on the CrN layer. The CrN layer has a columnar crystal structure such that an intensity ratio (111)/(200) of X-ray diffraction of a (111) plane to a (200) plane is 0.50-3.0 and also has a surface of 0.5-2.5 μm in surface roughness at a maximum height Rz specified by ANSI B46.1 or 16-35% at a load length rate Mr1 specified by JIS B 0671-2.SELECTED DRAWING: Figure 1 【課題】ＣｒＮ層の上に硬質炭素層を被覆させる際、同じ成膜装置内で一連の連続した工程で行うことができ、しかも、従来よりもＣｒＮ層に対する硬質炭素層の密着性を確保して、ＣｒＮ層の有する耐摩耗性及び耐剥離性に加えて、硬質炭素層の有する低摩擦性を発揮させて、優れた摺動特性を安定的に確保することができる成膜技術を提供する。【解決手段】基材の上にＣｒＮ層が下地層として形成され、ＣｒＮ層の上に硬質炭素層が積層された積層被覆膜であって、ＣｒＮ層が、（１１１）面の（２００）面に対するＸ線回折の強度比（１１１）／（２００）が０．５０〜３．０で、柱状結晶構造を有すると共に、ＡＮＳＩ Ｂ４６．１に規定される最大高さＲｚで０．５〜２．５μｍの表面粗さ、または、ＪＩＳ Ｂ ０６７１−２に規定される負荷長さ率Ｍｒ１で１６〜３５％の表面を有している積層被覆膜。【選択図】図１