DEVICE AND METHOD FOR INCREASING QUALITY OF NATURAL OXIDE OF SILICON-BASED SURFACE BY ULTRAVIOLET LIGHT IRRADIATION

• Main Authors: SHIAO MING-HUA, WU JIA-YI, CHANG MAO-NAN, ZHAN CONG-YU, LIN JUN-TING
• Format: Patent
• Language: English; Japanese
• Published: 20.09.2018
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; SEMICONDUCTOR DEVICES; TESTING

PROBLEM TO BE SOLVED: To provide a device and a method which enable the increase in the quality of natural oxide of a silicon-based surface by ultraviolet light irradiation, and enable the efficient cost cutting.SOLUTION: A UV light source 1, of which the wavelength range is from 180 to 400 nm, comp...