OPTICAL WAVEGUIDE STRUCTURE

• Main Authors: KAWAKITA YASUMASA, HIGA YASUTAKA
• Format: Patent
• Language: English; Japanese
• Published: 20.09.2018
• Subjects: BASIC ELECTRIC ELEMENTS; DEVICES USING STIMULATED EMISSION; ELECTRICITY; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS

PROBLEM TO BE SOLVED: To provide an optical waveguide structure capable of increasing heating efficiency by a heater and with less constraints of a structure design.SOLUTION: An optical waveguide structure comprises: a substrate; a lower clad layer located on the substrate; an optical waveguide layer located on the lower clad layer; an upper clad layer located on the optical waveguide layer; a heater located on the upper clad layer; and an accumulation structure part located between the substrate and the optical waveguide layer and accumulated so that semiconductor portions made of different semiconductor materials are adjacent in an accumulation direction.SELECTED DRAWING: Figure 3 【課題】ヒータによる加熱効率を高めるとともに、構造設計の制約がより少ない光導波路構造を提供すること。【解決手段】光導波路構造は、基板と、前記基板上に位置する下部クラッド層と、前記下部クラッド層上に位置する光導波層と、前記光導波層上に位置する上部クラッド層と、前記上部クラッド層上に位置するヒータと、前記基板と前記光導波層との間に位置し、互いに異なる半導体材料からなる半導体部分が堆積方向において隣接するように堆積した堆積構造部と、を備える。【選択図】図３